In-House Analytical Capability

• ICP-MS – Surface Metals
• SPV / uPCD – Lifetime, Bulk Fe
• SRP (Spreading Resistance Profiling) – Epi Doping profiles & transition width
• Cleave & Etch – Surface and Bulk Defect delineation.
• Tencor SP-1, TBI – Laser surface inspection.
• ADE 9800 – Dimensional & resistivity (E2 flatness capability)
• Microscope with Nomarksi DIC
• Epi Layer Thickness and Resistivity Metrology (CV, 4PP, FT-IR)
• Advanced FTIR – Epi Thickness, Substrate Resistivity, Transition Width measurements
• Optical Comparator – Edge Profile measurements
• Auto-Titration – Cleanline Bath Monitoring